Method of manufacturing a metal matrix and a master disc suitable for the manufacture of matrices

ABSTRACT

A master disc which is provided on one side with a reflective optical structure and a recording double-layer is exposed to a first laser beam which scans the optical structure and to a second laser beam which is controlled by the first beam, information bits in the form of bulges being formed in the recording layer due to exposure to the second beam, a metal skin being subsequently provided on the recording layer, in which metal skin the surface structure of the recording layer is copied and, finally, the matrix thus obtained being removed from the master disc.

This is a continuation-in-part of application Ser. No. 246, 584, filedSept. 19, 1988, now abandoned.

BACKGROUND OF THE INVENTION

The invention relates to a method of manufacturing a metal matrix whichcan suitably be used for the manufacture of optically readable syntheticresin information carriers. The manufacture of synthetic resininformation carriers can, for example, be carried out by means of acompression moulding or injection moulding process. In these processes,a heated, liquid synthetic resin such as polycarbonate orpolymethylmethacrylate is forced into a mould at a raised pressure,which mould comprises one or two of the above-mentioned metal matrices.After the synthetic resin has cooled and solidifed, the informationcarrier obtained such as a Compact Disc (®) or Laser Vision Disc (®) isremoved from the mould. One or both surfaces of the synthetic resininformation carrier is or are provided with an optically readablestructure which is a copy of the optical structure of the matrix ormatrices.

In the customary method of manufacturing a metal matrix, a master discis used which consists of a glass plate which is provided on one sidewith a layer of a positive photoresist. On the side of the photoresistlayer, the master disc is exposed to laser light which is modulated inconformity with the information to be recorded. In a subsequentdeveloping step the exposed parts of the photoresist layer are removedso that information bits, hereinafter also termed effects, are formed.Subsequently, a metal layer such as an Ag layer is applied to thedeveloped photoresist layer by means of an electroless depositionprocess such as a vapour-deposition process, a sputtering process or achemical plating process. A further metal layer such as an Ni layer isapplied to the metal layer by electrodeposition. After the master dischas been removed a metal matrix (father disc) is obtained whose opticalstructure is a copy of the structure of the exposed and developedphotoresist layer. Additional metal copies of the father disc can bemanufactured by means of electrodeposition. These copies are calledmother and son matrices. The latter matrices are ofter employed in theabove-mentioned manufacture of synthetic resin information carriers.

Since the master disc is a product from which a number of matrices and,subsequently, many thousands of synthetic resin information carriers arederived, it has to meet very high quality requirements. Theabove-mentioned effects are arranged in a spiral-shaped track. The widthof the effects amounts to approximately 0.5 μm. The distance between theturns of the track, i.e. the track pitch, is 1.6 μm. The length of theeffects varies from approximately 0.9 to 3.6 μm. The length of theeffects determines the information recorded. On using an EFM (eight outof fourteen modulation) signal, the length of the effects must vary, asstated above, in discrete steps of 0.3 μm between the smallest (0.9) andthe largest (3.6) length dimension. This means that it must be possibleto provide and, moreover, detect optically and distinguish effectshaving length dimensions of 0.9; 1.2; 1.5; 1.8; 2.1; 2.4; 2.7; 3.0; 3.3;and 3.6 μm.

Owing to this, high demands are imposed on the mechanical accuracy withwhich the information track is provided. This requires the use ofexpensive equipment comprising laser measuring systems and air cushionsupporting means.

SUMMARY OF THE INVENTION

It is an object of the invention to provide a method of manufacturing ametal matrix, which does not require the use of expensive equipment.Another object is to provide a method of manufacturing a metal matrix,in which the master disc no longer has to be developed after it has beenexposed to light. Thus, a considerable simplification of the method isobtained.

These objects are achieved by a method of the type described in theopening paragraph, which is characterized in that a substrate plate isprovided on one side with a reflective optical structure and a recordinglayer, the recording layer comprising a synthetic resin double-layerhaving an expansion layer facing the substrate plate and a retentionlayer connected thereto, the optically reflective structure beingprovided at the interface of the substrate plate and expansion layer orat the interface of the expansion layer and retention layer or at theinterface of air and the retention layer, the optical structure of themaster disc thus obtained being scanned by a first continuous, laserlight beam, the recording layer being exposed to a second laser lightbeam which is controlled by the first beam and pulsated in conformitywith the information to be recorded, information bits being formed inthe recording layer due to the exposure, the recording layer beingprovided with a metal skin and the metal matrix thus obtained, in whichthe surface structure of the recording layer is copied, being removedfrom the recording layer.

BRIEF DESCRIPTION OF THE DRAWING

In the drawing:

FIG. 1 is a cross-sectional view of a preferred embodiment of a masterdisc according to the invention, used in a method according to theinvention, and

FIG. 2 is a cross-sectional view of another preferred embodiment of amaster disc according to the invention, used in a method according tothe invention.

In a favorable embodiment of the method, the reflective opticalstructure is a groove structure carrying a reflection layer, which isscanned and followed on the basis of phase differences with thenon-grooved surroundings. The groove is mostly spiral-shaped and has adepth of λ/8 n, wherein λ is the wavelength of the laser light by whichthe groove is scanned and n the refractive index of the material inwhich the groove is formed. The depth amounts to, for example, 60 nm.With such a depth the path-length difference between a laser beamreflected in the groove and a laser beam reflected by the surrounding ofthe groove is 1/2λ and the phase difference is 180° . The width of thegroove is approximately 0.6 μm. The distance between the turns of thegroove is approximately 1.6 μm.

It is alternatively possible to use a so-called amplitude structureinstead of this groove or phase structure. Such an amplitude structureis obtained by providing on a flat surface, such as the surface of thesubstrate, a sprial-shaped path of a material having a differentreflective power for the laser light used than the surface. An exampleof this is a spiral-shaped path which consists of a metal which has beenapplied to a substrate of synthetic resin or glass by means of vapordeposition or sputtering.

In an efficacious embodiment of the method according to the invention, aplastic substrate plate of, for example, polycarbonate orpolymethylmethacrylate is used in which a groove is formed, or a glasssubstrate plate is used which is provided on one side with a light-curedsnythetic resin layer in which the above-said groove is formed. Thesynthetic resin layer in which the groove is formed is coated with ametal layer, such as Al layer, which is provided by vapor deposiiton andon which the recording layer is provided.

In a further preferred embodiment of the method according to theinvention, the effects are recorded in the parts of the recording layersituated between the grooves. These parts are also called land parts.

Due to the above-described coupling of the modulated write laser beam tothe continuous laser beam which is focussed to the follower track, thewriting beam is positioned exactly on the master disc. Thus, a lasermeasuring system and an air cushion supporting means, as applied in theknown method for the manufacture of matrices, are superfluous.

The effects recorded in the recording layer can be read immediately bymeans of laser light. Thus, it becomes possible to optimize tracking andthe read signal in a test strip of the master disc, in particular byadjusting the write energy. In this way, the effects can be optimallyrecorded in the recording layer of the master disc, as a result of whichthe ultimately produced metal matrix is of a high quality. Besides, forthe manufacture of the matrix only one master disc is necessary. If aphtoresist is used, as described above, the quality cannot be determineduntil the entire disc has been exposed and developed. A frequentconsequence hereof is that several master discs are necessary to produceone metal matrix of a good quality.

The optical reflective structure may be a phase structure or anamplitude structure, as described above. The follower track formed bythis structure is scanned and followed by a continuous laser beamemanating from, for example, an infrared laser such as an AlGaAs laserhaving an emission wavelength of, for example, 820 nm. Information bits(effects) are recorded in the recording double-layer by means of a laserbeam which is pulsated in conformity with the information to berecorded. This write beam emanates from, for example, an Ar⁺ laserhaving an emission wavelenght of 458, 488 or 514 nm. The Ar⁺ laser canreadily be coupled mechanically to the AlGaAs laser such that, forexample, the light spot of the Ar⁺ laser on the above-described masterdisc (substrate plate having an optical structure and a recording layer)is moved in a diametrical direction over a distance equal to the trackpitchi or half the track pitch relative to the light spot of the AlGaAslaser. The track pitch is the distance between successive turns of thefollower track (groove). In the exposed areas of the recording layer,the effects are recorded in the form of bulges which can be readdirectly on the baiss of phase differences with the environment of thebulges by means of a continuous laser beam emanating from, for example,a He--Ne laser having an emission wavelength of 633 nm. Subsequently,the recording layer is provided with a metal layer in an elecltrolessdeposition procoess and, subsequently, with a further metal layer whichis provided by means of electrodeposition. The surface structure of themetal matrix thus obtained is a copy of the structure of the recordinglayer.

The expansion layer facing the substrate plate has a relatively highcoefficient of expansion and a glass transition temperature (Tg) whichis below room temperature. The retention layer connected to theexpansion layer has a relatively low coefficient of expansion and aglass transition temperature which is above room temperature. Theexpansion layer, hereinafter also termed underlayer, preferably has across-link structure with a relatively high cross-link density so thaton expansion an elastic and no plastic deformation takes place. Thematerial of the expansion layer is, preferably, an elastomer such as anatural or synthetic rubber. A suitable material yielding good resultsis a polyurethane elastomer.

The material of the retention layer, hereinafter also termed top layer,is vitreous at room temperature. At temperatures above the transitiontemperature (Tg) the material is rubberlike. It has a relatively lowmodulus of elasicity. Suitable synthetic resins for the top layer arecross-linked polymers having a relatively low cross-link density such ascross-linked polystyrene, polycarbonate, polyacrylates,polymethacrylates, and resins such as silicone resins, alkyd resins andeposy resins. A very suitable material is a cross-linked epoxy resin.

Both the expansion layer and the retention layer are provided with a dyewhich absorbs the write laser light. Preferably, the same dye stuff isused in the expansion layer and in the retention layer. The quantity ofdye amounts to between 1 and 15% by weight. Suitable dyes for absorbingthe laser light of the Ar⁺ laser are listed in the Colour Index (CI)such as, in particular, C.I Solvent Red colorants. Very suitable dyesare C. I. Solvent Red 92 (Savinyl Scarlet ®) and C.I. Solvent Red 26.

Due to exposure to modulated write laser light, the temperature rises inboth the top layer and the underlayer to values which substantiallyexceed the transition temperature of the top layer. The material of theunderlayer is subject to a high degree of expansion, thereby forcing upthe material of the top layer, which has a low degree of expansion, sothat a bulge is formed. On cooling, the temperature of the top layerdecreases to below the glass transition point so that this layer becomesrigid. The underlayer is still in a heated and expanded condition. Onfurther cooling, the underlayer, which is fixed by the top layer, cannotshrink any further. The recorded effect (bulge) remains in tact. Duringthe write process, the master disc is rotated at 3-10 Hz, while thelaser beam moves diametrically across the disc. The length dimension ofthe effect can be varied by varying the exposure time, length dimensionsfrom 0.9 to 3.6 μm (in intermediate steps of 0.3 μm), which arenecessary for, for example, recording EFM-modulated signals, beingobtained. The width dimension of the effects remains unchanged orsubstantially unchanged so that the spiral-shaped information trackdefined by the effects has a uniform width.

In this respect it is to be noted that an erasable optical recordingmedium comprising a recording double-layer is known from European PatentApplication No. 0.136.070. Different dyes are used in retention layerand expansion layer of the known recording medium, i.e. dyes having adifferent absorption characteristic. The dye used in the retention layermust not absorb the laser light during the write process, but mustabsorb it during the erase process. In the expansion layer it is theother way round. The dye applied in the expansion layer absorbs thewrite laser light and is transparent to the laser light used in theerase process. The above-mentioned European Patent Application does notsay or suggest that the recording medium can be used as a master discfor the manufacture of matrices. Tests carried out by Applicants on theknown recording medium, the top layer being transparent or substantiallytransparent to the write laser light used, have shown that this mediumis not suitable for the above-said application because if the lengthdimension of the recorded effects (bulges) varies the width dimensionvaries also so that no information track having a uniform width isobtained. In a mastering process for the manufacture of matrices this isnot permissible.

In a further suitable embodiment of the method according to theinvention, the reflective optical structure is a groove structure towhich a reflection layer is applied, and which is provided at theinterface of substrate plate and expansion layer. The reflection layermay have a high reflective power, the reflection being from 80-100%. Areflection layer having a low reflective power such as 5-20% mayalternatively be used.

In another suitable embodiment, the reflective optical structure is agroove structure to which a reflection layer is applied and which isprovided at the interface of expansion layer and retention layer or atthe interface of air and retention layer. Preferably, the reflectionlayer has a low reflective power of, for example, 5-20%. This low degreeof reflection is desirable so as to ensure that sufficient laser lightis absorbed in both layers of the recording layer.

The invention also relates to a master disc which is suitable for themanufacture of matrices which in turn are used in the manufacture ofoptically readable information carries, the master disc comprising asubstrate plate which is provided on one side with a recordingdouble-layer in which information bits in the form of bulges can berecorded by exposure to a modulated laser beam, the recordingdouble-layer comprising an expansion layer facing the substrate, and aretention layer connected thereto, an optically readable, reflectivestructure which forms a follower track for positioning the laser beambeing provided at the interface of substrate plate and expansion layeror at the interfce of expansion layer and retention layer or at theinterface of retention layer and air.

The invention will now be explained in greater detail by reference tothe figures of the drawing.

In FIG. 1, reference numeral 1 refers to a synthetic resin substrate ofpolycarbonate. Substrate plate 1 is provided on one side with aspiral-shaped path 2 of Al which has been provided by vapour depositionand which has a reflection of 15%. Instead of a metal such as Al acolorant may alternatively be used.

An expansionn layer 3 is applied to plate 1. The layer 3 comprises across-linked urethane elastomer which is commercially available underthe trade name Solithane 113, wherein 8% by weight of the dye savinylscarlet is finely dispersed or dissolved. The layer 3 is manufactured ina spin-coating process in which a solution of the not cross-linkedpolyurethane in an organic solvent to which the dye is added is providedin the center of the substrate plate 1. Subsequently, the substrateplate 1 is rotated so that the solution is uniformly distributed overthe surface of the plate 1 and, simultaneously, the solvent isevaporated. Then, the layer obtained in cured by heating or exposure tolight such as UV light. A retention layer 4 is applied, also by means ofspin-coating, to the expansion layer 3. The layer 4 comprises a weaklycross-linked epoxy resin in which 8% by weight of the dye savinylscarlet is dissolved or finely dispersed. The layers 3 and 4 togetherform the recording double-layer 5.

The master disc 1-5 thus obtained is exposed to a laser beam 6 emanatingfrom an AlGaAs laser 7. Beam 6 is focussed on the spiral-shaped track 2.The emission wavelength of the AlGaAs laser is approximately 820 nm. Themaster disc 1-5 is rotated at a rate of 3-10Hz. The laser 7 is moved ina radial direction relative to the master disc. In this process, thelaser 7 follows the follower track 2 on the basis of reflectiondifferences of the track relative to the environment of the track wherethere is no reflection layer. An argon (Ar⁺) laser 8 having an emissionwavelength of 458, 488 or 514 nm is coupled to laser 7, for example byfixing both layers relative to each other in a common housing 9. In thisprocess, the laser 8 is moved in a radial direction (seen from themaster disc 1-5) relative to the laser 7 over a distance equal to halfthe joint width of track 2 and track pitch 10. The track pitch 10 is thedistance between the turns of the spiral-shaped track 2. The laser beam11 emanating from the laser 8 is focussed on the recording double-layer5, the spot size of the beam being from 0.1-1 μm. The laser beam 11 ismodulated according to EFM. During the recording of information the discis rotated at the said rate of 3-10 Hz, while the laser beam 11 is moveddiametrically across the disc. Due to this, a spiral-shaped track ofbits 12 is formed. In the exposed areas the light energy is convertedinto heat both in the expansion layer 3 and the retention layer 4. Inboth layers the temperature rises to values substantially exceeding theglass transition temperature of layer 4. Due to the temperature increasethe layers 3 and 4 expand, the expansion of layer 3 exceeding that oflayer 4 due to the high coefficient of thermal expansion. Thus,additional bulging (stretching) of the layer 4 takes place as a resultof the strongly expanding layer 3. However, no or hardly any plasticdeformation takes place. The stretching remains within the elasticlimit. An information bit in the form of a bulge 12 is formed. Oncooling, the temperature of the retention layer 4 decreases to below theglass transition temperature so that the layer becomes rigid and furtherdeformation becomes impossible. The underlayer is still in an expandedcondition. Consequently, the information bit 12 does not disappear.

The length dimension of the bit varies from 0.9 to 6.0 μm withintermediate steps of 0.2 μm. The length of the bit is determined by theexposure time which varies, for example, from 0.25 μs to 5 μs. The powerof the laser used is, for example, from 1 mW to 15 mW on the disc. Allbit have the same width dimension of approximately 0.6 μm. The trackwidth and, hence, the track pitch are excellently defined.

After the bits have been formed a metal layer 13 of, for example, Ag isapplied by vapor deposition. An Ni skin 14 is applied thereto by meansof electrodeposition. Finally, the metal matrix 13, 14 formed is removedfrom the master disc 1-5.

In FIG. 2, reference numeral 20 refers to a glass substrate plate whichis provided on one side with an expansion layer 21. Expansion layer 21corresponds to the expansion layer 3 of FIG. 1. This layer is providedon the free surface with a spiral-shaped groove 22. The groove isprovided by means of the matrix whose surface contains a spiral-shapedridge which forms the negative of the groove 22. A layer of a solutionof a polyurethane in an organic solvent is applied to the surface of thematrix, to which solution a dye is added. Upon evaporation of thesolvent, the substrate plate 20 is placed on the polyurethane layer.Subsequently, the polyurethane synthetic resin is cured by exposing itto light such as UV light or by heating, in which process the polymermolecules are cross-linked. Finally, the substrate plate and the curedpolyurethane layer connected thereto, the surface of which is a copy ofthat of the matrix, is removed from the matrix.

The surface of the expansion layer 21 in which the groove 22 is formedis subsequently provided with a layer of Al, not shown, which isprovided by means of vapor deposition and which has a reflection of 15%.Retention layer 23 is provided on top of the set layer. The retentionlayer 23 corresponds to the retention layer 4, as shown in FIG. 1.Expansion layer 21 and retention layer 23 together form the recordingdouble layer 24. The laser beam 25 emanating from an AlGaAs laser 26 isfocussed on the groove structure 22. The AlGaAs laser has an emissionwavelength of 820 nm. The master disc 20-24 is rotated at a rate of3-10Hz. The laser beam 25 is moved diametrically across the discsurface. In this process, the laser beam 25 follows the groove 22 on thebasis of phase differences between the laser light reflected by thegroove and the laser light reflected by the environment of the groove.Thus, the positioning of the laser beam is determined by the groove 22.In contrast with conventional mastering and production of metalmatrices, the present method requires no laser measuring system and aircushion supporting means. Laser 26 is coupled to an Ar⁺ laser 27 so thatthe movement of laser 26 is also imposed upon laser 27. To this end,laser 26 and laser 27 are accommodated in a common housing 28. Relativeto laser beam 25, beam 29 emanating from laser 27 is moved in a radialdirection relative to the disc over a distance equal to half the jointwidth of groove 22 and the groove pitch between the groove turns.

Laser beam 29 is modulated in conformity with the information to berecorded. In the exposed areas of the recording double-layer 25information bits are formed in the form of bulges 30 having differentlength dimensions in conformity with the information recorded and havingthe same of substantially the same width dimension. The formation ofbulges 30 corresponds to the formation of bits 12, as described withrespect to FIG. 1. The bits or bulges 30 can be immediately be readoptically by means of a He--Ne laser, not shown, on the basis of phasedifferences of the light reflected by the bits. The data obtained can beused immediately to check and, if desired, adjust the writing process.

After the bits have been provided, a metal layer, not shown, such as anAg layer is provided on retention layer 23 by means of vapor deposition.An Ni layer 31 is applied to this layer by means of electrodeposition.Finally, the metal matrix obtained and consisting of the Ag layer andthe nickel layer 30 is removed from the master 20-24.

We claim:
 1. Method of manufacturing a metal matrix particularly adaptedfor the manufacture of optically readable synthetic resin informationcarriers, characterized in that a substrate plate is provided on oneside with a reflective optical structure and a recording layer, therecording layer comprises a synthetic resin double-layer having anexpansion layer facing the substrate plate and a retention layerpositioned on the side of the expansion layer away from the substrate,an optically reflective structure is provided at the interface of thesubstrate plate and the expansion layer or at the interface of theexpansion layer and said retention layer or at the interface of air andsaid retention layer thereby forming a master disc, the opticalstructure of the master disc thus obtained is scanned by a continuous,first laser light beam, the recording layer is exposed to a second laserlight beam which is controlled by the first beam and pulsated in aconformity with information to be recorded, information bits being thusformed in the recording layer due to the exposure to said second laserlight beam, the recording layer is then provided with a metal skin andthe metal skin, in which the surface structure of the recording layer iscopied, is removed from the recording layer thus forming the metalmatrix.
 2. A method of claim 1 wherein the reflective optical structureis a structure provided with grooves and with a reflective layer whichgrooves are scanned and followed on the basis of phase differences withthe portions of the structure surrounding the grooves.
 3. A method asclaimed in claim 5, characterized in that the information bits areformed in the parts of the recording layer situated between the grooves.